Novel Technique to Identify Systematic and Random Defects during 65 nm and 45nm Process Development for Faster Yield Learning

机译：在65 nm和45nm工艺开发过程中识别系统和随机缺陷的新技术，可加快产量学习

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Advanced bright field inspection tools available today applied on development wafer may often result in 100 k to 1 M defects per wafer. Such defect data consist of systematic and random defects that may be yield limiting or may be just cosmetic issue with

机译：目前在显影晶片上使用的先进的明场检测工具通常会导致每个晶片产生100 k至1 M的缺陷。这样的缺陷数据由系统的和随机的缺陷组成，这些缺陷可能会限制产量，或者可能仅仅是表面上的

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《Advanced Semiconductor Manufacturing Conference, 2007 IEEE/SEMI》|2007年|P.54-57|共4页
会议地点 StresaItaly
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Yeh; J.H.; Park; A.;
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inspection; integrated circuit testing; integrated circuit yield; sampling methods; scanning electron microscopy; SEM review; STI cave defect; advanced bright field inspection tools; defect inspection technology; defect sampling; faster yield learning; random defec;

机译：检查;集成电路测试；集成电路成品率；抽样方法；扫描电子显微镜; SEM审查； STI洞穴缺陷；先进的明场检查工具；缺陷检查技术；缺陷取样；更快的收益学习；随机defec;

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3. Enabling yield at 45nm: Managing process variability [J] . John Sturtevant Solid state technology . 2007,第9期

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4. Novel Technique to Identify Systematic and Random Defects during 65 nm and 45nm Process Development for Faster Yield Learning [C] . Yeh, J. H., Park, . 2007

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Novel Technique to Identify Systematic and Random Defects during 65 nm and 45nm Process Development for Faster Yield Learning

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