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Detection and Fault Isolation of Elevated Resistive Paths in Copper Pillar (CuP) Flip Chip Package Device

机译:铜柱倒装芯片封装器件中高阻路径的检测和故障隔离

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摘要

The demand for higher input/output (I/O) capability, smaller package footprint, low cost, combined with good electrical properties and better electromigration performance has made the copper pillar (CuP) bump an excellent first-level interconnect in flip chip devices built in the recent years. The ability to successfully qualify a new package technology, for this case, CuP flip chip, is dependent on a robust package design, an optimal and stable assembly process, a comprehensive stress plan, and of equal importance, is the development of an electrical test methodology that can detect issues exacerbated by the stress, as well as, the availability of fault isolation methods to rootcause these failures. In this paper, we present the detection of both intrinsic and extrinsic CuP bump interconnect reliability issues exacerbated by temperature cycling through the boundary scan test. The CuP flip chip package-designed electrical and physical failure analyses (FA) used to rootcause the failures were presented. Assembly process improvements to address the root cause of the extrinsic failure modes, as well as interconnect design improvements, to eliminate the contribution of the manufacturing process/package design to the intrinsic failure mechanisms reliability testing aims to expose, were also discussed.
机译:对更高的输入/输出(I / O)功能,更小的封装尺寸,低成本,良好的电性能和更好的电迁移性能的需求,使铜柱(CuP)凸点成为内置倒装芯片器件中出色的一级互连在最近几年。对于这种情况,成功验证新封装技术(如CuP倒装芯片)的能力取决于可靠的封装设计,最佳且稳定的组装工艺,全面的应力计划,并且同等重要的是电气测试的发展。可以检测压力加剧的问题的方法,以及可以使用故障隔离方法来根源这些故障的方法。在本文中,我们通过边界扫描测试介绍了温度循环加剧的内在和外在CuP凸点互连可靠性问题的检测。提出了用于导致故障的CuP倒装芯片封装设计的电气和物理故障分析(FA)。还讨论了解决外部故障模式根本原因的装配工艺改进,以及消除互连工艺设计以消除制造过程/封装设计对可靠性测试旨在揭示的固有故障机制的影响。

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