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ELECTROMAGNETIC WAVE ATTENUATOR, ELECTRONIC DEVICE, FILM FORMATION APPARATUS, AND FILM FORMATION METHOD

机译:电磁波衰减器,电子器件,成膜装置和膜形成方法

摘要

According to one embodiment, an electromagnetic wave attenuator includes a first structure body. The first structure body includes a first member, a second member, and a third member. The first member includes a first magnetic layer and a first nonmagnetic layer alternately provided in a first direction. The first nonmagnetic layer is conductive. The first direction is a stacking direction. The second member includes a second magnetic layer and a second nonmagnetic layer alternately provided in the first direction. The second nonmagnetic layer is conductive. The third member includes a third nonmagnetic layer. The third nonmagnetic layer is conductive. A direction from the third member toward the first member is along the first direction. A direction from the third member toward the second member is along the first direction. A first magnetic layer thickness is greater than a second magnetic layer thickness.
机译:根据一个实施例,电磁波衰减器包括第一结构主体。 第一结构主体包括第一构件,第二构件和第三构件。 第一构件包括第一磁层和第一磁性层,第一磁层和第一非磁层在第一方向上交替设置。 第一非磁性层是导电的。 第一方向是堆叠方向。 第二构件包括第二磁性层和在第一方向上交替设置的第二非磁性层。 第二非磁性层是导电的。 第三构件包括第三非磁性层。 第三非磁性层是导电的。 从第三构件朝向第一构件的方向沿第一方向。 从第三构件朝向第二构件的方向沿第一方向。 第一磁层厚度大于第二磁性层厚度。

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