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Fabrication methods of patterned metal film layer, thin film transistor and display substrate

机译:图案化金属膜层,薄膜晶体管和显示基板的制造方法

摘要

A fabrication method of a patterned metal film layer, including: sequentially depositing a first metal layer and a photoresist on a substrate; forming a first patterned photoresist in the photoresist retaining area; etching the first metal layer, and removing a part of the first metal layer having a first thickness and located in an edge area of the photoresist retaining area and in the photoresist removing area, to form a second metal layer; processing the first patterned photoresist to form a second patterned photoresist; etching and removing a part, which is not in contact with the second patterned photoresist, of the second metal layer on the substrate to form a patterned metal film layer.
机译:一种图案化金属膜层的制造方法,包括:在基板上顺序沉积第一金属层和光致抗蚀剂;在光致抗蚀剂保持区域中形成第一图案化光致抗蚀剂;蚀刻第一金属层,并除去具有第一厚度的第一金属层的一部分,并且位于光致抗蚀剂保持区域的边缘区域和在光致抗蚀剂去除区域中,以形成第二金属层;处理第一图案化的光致抗蚀剂以形成第二图案化光致抗蚀剂;蚀刻和去除在基板上的第二金属层的第二金属层的第二图案化光致抗蚀剂与第二图案化光致抗蚀剂接触的部分以形成图案化的金属膜层。

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