Method for operating a particle beam device and / or a light microscope, computer program product and particle beam device and light microscope for carrying out the method

摘要

The invention relates to a method for operating a particle beam device and / or a light microscope, a computer program product and a particle beam device and a light microscope with which this method can be carried out. The method comprises changing a first temperature of an object, the object being arranged on an object receiving device which is movable by a motor operated with a supply current. By changing the first temperature of the object, a second temperature of the object receiving device is changed from a first temperature value to a second temperature value. The method further comprises changing the supply current of the motor from a first current value to a second current value, the supply current being designed to hold the specimen receiving device, and changing a temperature of the specimen receiving device from the second temperature value to a third temperature value based on heat generated by the motor which is achieved by the second current value of the supply current and supplied to the specimen receiving device. TOT1 - 15 ° C 15 TOT3 TOT1 + 15 ° C applies, TOT1 being the first temperature value of the specimen receiving device and TOT3 being the third temperature value of the specimen receiving device.