CHARGED PARTICLE BEAM MICROSCOPE DEVICE, CHARGED PARTICLE BEAM APPLICATION DEVICE, CHARGED PARTICLE BEAM MICROSCOPIC METHOD, CHARGED PARTICLE BEAM INSPECTION METHOD AND ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an electron microscope device using a short focus objective lens that enables acquiring a good image of high resolution without any distortion in a wide range from low magnification to high magnification at the observation in low acceleration voltage condition.;SOLUTION: In the electron microscope device that is constructed of an electron source 1, a focus lens 2, an upper stage deflection coil 4, a lower stage deflection coil 5, an objective lens 7, and a correction magnetic field lens 9 for electron beam deflection or the like, the distortion aberration that is generated in the objective lens 7 is cancelled by the reverse direction distortion aberration caused by the correction magnetic field lens 9 for electron deflection, and a good scanning electron microscopic image having a high resolution without any distortion in a wide range from low magnification to high magnification is obtained.;COPYRIGHT: (C)2002,JPO