Method for operating a particle beam device, computer program product and particle beam device for carrying out the method

摘要

The invention relates to a method for operating a particle beam device for imaging and / or analysis of an object, a computer program product and a particle beam device for carrying out the method. The particle beam device is designed, for example, as an electron beam device and / or an ion beam device. The method comprises: generating a particle beam; Focusing the particle beam on a raster area (601) of the object, the raster area (601) being designed as a first surface; Scanning the particle beam over a grid field (602) on the object, the grid field (602) being designed as a second surface with a maximum deflection by a grid device, the first surface of the grid area (601) and the second surface of the grid field (602) a first, overlapping area (603) and wherein the second area of the grid field (602) has a second area (604) which does not overlap with the first area of the grid area (601); as well as generating an image and / or performing an analysis with detection signals that were generated exclusively on the basis of interaction particles and / or interaction radiation originating from the first overlapping area (603).