Mist generating device, mist film forming method, and mist film forming device

摘要

The mist generating device treats a carrier gas (CGS) containing a mist (Mst) of a solution containing fine particles or molecules of the material substance in order to deposit a layer of the material substance on the surface of the object to be treated (P). It is sprayed on the surface of water (P). In the mist generating device, a mist generating unit 14 that atomizes a solution to deliver a carrier gas (CGS) containing mist (Mst), and a carrier gas (CGS) from the mist generating unit 14 to be processed ( In the flow path until sprayed on the surface of P), an ultraviolet irradiation unit 20B for irradiating ultraviolet light having a wavelength of 400 nm or less to the mist Mst floating by the carrier gas CGS is provided.