MIST GENERATING DEVICE, FILM FORMING DEVICE, MIST GENERATING METHOD, FILM FORMING METHOD, AND DEVICE MANUFACTURING METHOD

摘要

The mist generating device MG1 for generating the mist MT containing the fine particles NP includes a vessel 30a containing a dispersion liquid DIL containing the fine particles NP, and vibration of a first frequency to the vessel ( 30a) by imparting to the dispersion (DIL) in the dispersion liquid (DIL) to suppress the aggregation of the particulate matter (NP) in the dispersion liquid (DIL), the first vibration unit (32a), higher than the first frequency and from the surface of the dispersion liquid (DIL) A second vibration unit 34a is provided that applies vibration of a second frequency for generating mist MT containing NP) to the dispersion liquid DIL in the container 30a.