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PHOTOACOUSTIC GAS SENSOR

机译:光声气体传感器

摘要

The invention relates to a device (100) having the following features: a microstructure (10) which has a MEMS structure or a MOEMS structure, a carrier (20) on which the microstructure (10) is arranged, a housing (30 ), which consists of a material that is transparent to at least one predetermined wavelength of light and hermetically encapsulates a cavity (40) which directly surrounds the microstructure (10) on the carrier (20). The device (10) can be designed as a light emitter unit (200) and / or light detector unit (300), it being possible for the units to be individually or jointly part of a photoacoustic gas sensor (400).
机译:本发明涉及一种具有以下特征的装置(100):微结构(10),其具有MEMS结构或MOEMS结构,所述载体(20)布置有所述微结构(10),所述载体(20)壳体(30)所述由透明于至少一个预定波长的光透明的材料组成,并且气密地封装腔(40),该腔(40)直接围绕载体(20)上的微观结构(10)。器件(10)可以设计为发光单元(200)和/或光检测器单元(300),所以单元可以单独地或共同地是光声气体传感器(400)。

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