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Electroforming master and method for manufacturing electroformed molds using the electroforming master

机译:使用电铸大师制造电铸模具的电铸造机和方法

摘要

Provided are an electroforming master that does not cause distortion in an electroforming mold, and a method for manufacturing an electroforming mold. In the present invention, an electroforming master having a relief pattern on a surface thereof is configured so as to be provided with a substrate having a flat surface and a Young's modulus of 50 GPa or greater, and a pattern film which has a Young's modulus of 10 GPa or less and in which a relief pattern is formed on the surface thereof. The flat surface of the substrate and the surface of the pattern film not provided with the relief pattern are affixed together by an adhesive layer over the entire surface thereof, the adhesion strength between the substrate and the pattern film due to the adhesive layer being 0.01 N/25 mm to 10 N/25 mm, or greater than 10 N/25 mm, and the adhesion strength being reducible to 10 N/25 mm or less by light irradiation or heat treatment of the adhesive layer.
机译:提供了一种电铸主体,其不会导致电铸模具中的变形,以及用于制造电铸模具的方法。在本发明中,在其表面上具有浮雕图案的电铸材料被配置为设有具有平坦表面的基板和50gPa或更大的杨氏模量,以及具有杨氏模量的图案膜10GPa或更小,其中在其表面上形成释放图案。基板的平坦表面和未设置有释放图案的图案膜的表面在其整个表面上通过粘合剂层固定在一起,基板和图案膜之间的粘合强度由于粘合剂层为0.01 n / 25mm至10n / 25mm,或大于10n / 25mm,并且通过粘合剂层的光照射或热处理可将粘合强度降低至10n / 25mm或更小。

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