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METHOD FOR ELECTROFORMING ELECTROFORMED MASTER DISK AND ELECTROFORMED MASTER DISK

机译:电镀电铸主磁盘和电铸主磁盘的方法

摘要

PURPOSE:To produce an electroformed master disk as an Ni master disk in a flaw-free state by attaching a conductive ring for electroforming to the outside periphery of an electroformed recording master disk and electrifying the recording surface of the recording master disk via the ring in an Ni plating bath at the time of producing an electroformed master disk to which an information recording master disk is transferred. CONSTITUTION:After an information 13 is cut by means of laser beam in a photoresist 4 applied to a glass plate 6 and a conductive film 5 is formed on the above by means of silver mirror reaction to form a photoresist master disk 10, Ni is electroformed to form an Ni master disk 1. A conductive ring 2 for electroforming having a diameter practically equal to that of the master disk 10 is placed on the outside periphery of the master disk 10, which is set in a member consisting of a cathode 8 and a presser part 7. The photoresist master disk 10 is immersed into an Ni plating bath and the conductive film 5 is electrified via a conductive plate 9 and the ring 2 to form an Ni electroformed layer 3, by which a pattern for the master disk 1 consisting of the electroformed layer 3 and the ring 2 is formed. Subsequently, the above pattern is taken out of the Ni plating bath and the surface of the Ni electroformed layer is polished, and then, the photoresist master disk 10 and the Ni electroformed layer 3 are peeled off, by which the Ni master disk 1 can he completed.
机译:用途:通过将用于电铸的导电环连接到电铸的记录母盘的外围,并通过该环使记录母盘的记录表面带电,以生产无缺陷状态的电铸母盘作为Ni母盘。在生产将信息记录母盘转移到的电铸母盘时的镀镍浴。组成:在通过激光束将信息13切割到玻璃板6上的光刻胶4中并通过银镜反应在其上形成导电膜5以形成光刻胶母盘10之后,对镍进行电铸从而形成Ni主盘1。将直径几乎等于主盘10的直径的用于电铸的导电环2放置在主盘10的外周上,其设置在由阴极8和阴极8组成的部件中。将光致抗蚀剂母盘10浸入Ni镀浴中,并且通过导电板9和环2使导电膜5带电,以形成Ni电铸层3,由此将用于母盘1的图案形成为Ni电铸层3。形成由电铸层3和环2组成的环。随后,从Ni镀浴中取出上述图案,并对Ni电铸层的表面进行抛光,然后,剥离光致抗蚀剂母盘10和Ni电铸层3,由此Ni母盘1可以他完成了。

著录项

  • 公开/公告号JPH03291392A

    专利类型

  • 公开/公告日1991-12-20

    原文格式PDF

  • 申请/专利权人 FUJI PHOTO FILM CO LTD;

    申请/专利号JP19900090456

  • 发明设计人 MATSUMOTO AKIRA;NAGATE HIROSHI;

    申请日1990-04-06

  • 分类号C25D1/00;C25D1/10;G11B7/26;

  • 国家 JP

  • 入库时间 2022-08-22 05:39:53

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