METHOD OF MANUFACTURING A III-V BASED OPTOELECTRONIC DEVICE ON A SILICON-ON-INSULATOR WAFER

摘要

A method of manufacturing a III-V based optoelectronic device on a silicon-on-insulator wafer. The silicon-on-insulator wafer comprises a silicon device layer, a substrate, and an insulator layer between the substrate and silicon device layer. The method includes the steps of: providing a device coupon, the device coupon being formed of a plurality of III-V based layers; providing the silicon-on-insulator wafer, the wafer including a cavity with a bonding region; transfer printing the device coupon into the cavity, and bonding a layer of the device coupon to the bonding region, such that a channel is left around one or more lateral sides of the device coupon; filling the channel with a bridge-waveguide material; and performing one or more etching steps on the device coupon, silicon-on-insulator wafer, and/or channel to provide a III-V semiconductor based waveguide in the device coupon, one or more bridge-waveguides in the channel, and a silicon waveguide in the silicon-on-insulator wafer.