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process for producing hard, haftfesten practically absorptionsfreien thin layers
process for producing hard, haftfesten practically absorptionsfreien thin layers
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机译:硬的,几乎没有吸收的薄膜的生产方法
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1,183,979. Coating by vapour deposition. BALZERS PATENT-und BETEILIGUNGS A.G. Sept.22, 1967 [Oct.29, 1966], No.43240/67. Heading C7F. [Also in Division C1] In the vapour deposition of e.g. titanium or silicon oxides or both in alternate layers, the material to be deposited is subjected to ultraviolet radiation simultaneously with deposition. The vapour deposition takes place in a reactive atmosphere e.g. oxygen.
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