process for the preparation of a thin insulating film, and a thin, if necessary by a carrier supported insulating film obtained by this method.

• 1. 评价用于形成绝缘膜的硅氧烷的方法、形成绝缘膜的涂布液及其制备方法、半导体器件用绝缘膜成型方法以及采用绝缘膜成膜法制备半导体器件的方法 [P] . 中国专利： CN1125481A . 1996-06-26
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  机译： 制备用于电容器的非常薄的绝缘膜以进行处理的方法，其中存在损坏膜的风险以及用于制造该膜的设备

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  机译： 一种用于绝缘膜的较薄材料的制备方法

• 5. A process for the preparation of thinner material for insulating films [P] . 德国专利： DE1124110B . 1962-02-22

  机译： 一种用于绝缘膜的较薄材料的制备方法

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