Thin Films Electroluminescent Devices with Zirconium-Aluminum Oxide Insulating Films Deposited by the Pyrosol Process

摘要

Zirconium-aluminum oxide films were deposited by the spray pyrolysis technique. The microstructure and properties of these films reveal that the zirconium-aluminum oxide possesses good insulating characteristics. This material was applied in electroluminescent devices with Manganese doped ZnS active film deposited as well by spray pyrolysis. The deposited films have relatively high dielectric constant, which result in low luminescence threshold voltage of electroluminescent devices.