Assembly of a scanning electron microscopy for operation in situ

摘要

The mobile assembly of a scanning microscope operating in situ comprises a column legere of a microscope 1, which may be raised directly on the object to be examined 19 by means of a support structure 16 resistant to the pressure and defining an enclosed chamber 4, the lower opening is delimited by an elastic joint peripheral 17 intended to be placed in abutment on the surface 19, the chamber 4 in view of the container 21 has a pumping device transportable 4. In order to allow the optical axis 15 of covering an angular range of the surface 19, the column 1 is a rise in the support 16 by a ball joint 22 sealed by a metallic membrane 23. / p & & p & application in particular to the control of the wings of an aircraft or mirrors.