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Planar semiconductor device with a guard ring structure, family of such devices and method of manufacture
Planar semiconductor device with a guard ring structure, family of such devices and method of manufacture
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机译:具有保护环结构的平面半导体器件,这种器件的族及其制造方法
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摘要
Component type semiconductor "planar, comprising a substrate (11) heavily doped with doping concentration c o and an epitaxial surface (12) carrier concentration c c o, wherein are formed a pn junction (13) Primary depth x j and a structure (14) of floating guard rings. According to the invention, this component also comprises, between the substrate (11) and the epitaxial surface layer (12), a second epitaxial layer (15) of concentration of holders c 'such that c o c' c.; Application to power devices operating at high voltages.
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机译:组件型半导体平面,包括重掺杂有掺杂浓度c o Sub>的衬底(11)和外延表面(12)载流子浓度c o Sub>,其中形成pn结(13)主深度x j Sub>和浮动保护环的结构(14)。根据本发明,该部件还包括在衬底(11)和外延表面层之间( 12),第二外延层(15)集中保持器c',使得c o Sub> c'> c .;应用于在高电压下工作的功率器件。
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