m represents a positive integer equal to or multiple integer of the valence number for R, n, represents a positive integer equal to or multiple integer of the valence number for M, M represents an element belonging to the group II of the periodical table, R represents a member selected from hydrogen (H), halogen (X) and hydrocarbon group, a represents a positive integer equal to or multiple integer of the valence number for B, b represents a positive integer equal to or multiple integer of the valence number for A and A represents an element belonging to the group VI of the periodical table, B represents a member selected from hydrogen (H), halogen (X) and hydrocarbon group."/>
公开/公告号EP0327034A3
专利类型
公开/公告日1990-10-17
原文格式PDF
申请/专利权人 CANON KABUSHIKI KAISHA;
申请/专利号EP19890101657
申请日1989-01-31
分类号H01L21/365;C30B25/02;C30B29/48;C23C16/30;C23C16/44;
国家 EP
入库时间 2022-08-22 06:14:04