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Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference

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1.Shape of grain size distributions during crystal grain nucleation in a-Si

机译：在A-Si中晶粒成核期间晶粒尺寸分布的形状
- 作者：Corrado Spinella;Salvatore A. Lombardo;Francesco Priolo
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- nucleation;
- amorphous silicon;
- rapid thermal anneals;
2.High rate deposition of ta-C:H using an electron cyclotron wave resonance plasma source

机译：使用电子回旋波共振等离子体源的Ta-C：H的高速率沉积
- 作者：N. A. Morrison;S. E. Rodil;A. C. Ferrari;J. Robertson;W. I. Milne
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- electron cyclotron wave resonance;
- tetrahedral amorphous carbon;
- high rate deposition;
3.Optical Properties of LPCVD silicon oxynitride

机译：LPCVD氧氮化硅的光学性质
- 作者：M. Modreanu;N. Tomozeiu;P. Cosmin;Mariuca Gartner
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- low pressure chemical vapour deposition;
- oxynitride;
- thin films;
- optical;
- infrared absorption;
4.Sensor properties of Pt doped SnO_2 thin films for detecting CO

机译：PT掺杂SnO_2薄膜检测CO的传感器性能
- 作者：A. V. Tadeev;G. Delabouglise;M. Labeau
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Sensor properties;
- Pt-doped SnO_2;
- carbon monoxide;
5.Coplanar amorphous silicon thin film transistor fabricated by inductively-coupled plasma CVD

机译：Coplanar非晶硅薄膜晶体管，由电感耦合等离子体CVD制造
- 作者：Sung Ki Kim;Se Il Cho;Young Jin Choi;Kyu Sik Cho;S. M. Pietruszko;Jin Jang
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- thin film transistor;
- amorphous silicon;
- plasma deposition;
6.Stability and quantum efficiency of a novel type of a-Si:H/a-SiC:H based UV detector

机译：一种新型A-Si：H / A-SiC：H基于UV检测器的稳定性和量子效率
- 作者：P. Mandracci;M. L. Rastello;P. Rava;F. Giuliani;F. Giorgis
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- thin film;
- UV detectors;
- photoelectrical properties;
- amorphous silicon;
7.In-situ diagnostics for preparation of laser crystallized silicon films on glass for solar cells

机译：用于在玻璃上制备用于太阳能电池的激光结晶硅膜的原位诊断
- 作者：G. Andra;J. Bergmann;F. Falk;E. Ose
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polycrystalline silicon layers;
- laser crystallization;
- optical diagnostics;
- time resolved measurement;
8.Electronic properties of bottom gate silicon nitride/hydrogenated amorphous silicon structures

机译：底栅氮化硅/氢化非晶硅结构的电子性能
- 作者：J. P. Kleider;C. Longeaud;F. Dayoub
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- amorphous silicon;
- silicon nitride;
- bottom gate;
- defect pool;
9.Nitrogen-added Al rare-earth alloys for thin film transistors

机译：用于薄膜晶体管的氮气稀土合金
- 作者：Toshiaki Arai;Hiroshi Takatsuji;Hideo Iiyori
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- aluminum-rare-earth alloy;
- nitrogen;
- void;
- hillock;
10.Influence of surface morphology of the polycrystalline silicon on field electron emission

机译：多晶硅表面形态对现场电子发射的影响
- 作者：Anatoli A. Evtukh
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Field electron emission;
- polycrystalline silicon;
- asperities;
11.Structure of polycrystalline silicon films deposited at low temperature by plasma CVD on substrates exposed to different plasma

机译：在暴露于不同等离子体上的基板上通过等离子体CVD沉积在低温下沉积多晶硅膜的结构
- 作者：S. Moniruzzaman;T. Inokuma;Y. Kurata;S. Takenaka;S. Hasegawa
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- poly-Si;
- surface treatment;
- structural properties;
- plasma enhanced chemical vapor deposition;
- nucleation density;
12.High quality, relaxed SiGe epitaxial layers for solar cell application

机译：高品质，轻松的SiGe外延层，用于太阳能电池应用
- 作者：K. Said;J. Poortmans;M. Caymax;R. Loo;A. Daami;G. Bremond;O. Kruger;M. Kittler
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Si_(-x)Ge_x layers;
- reduced pressure chemical vapor deposition;
- electron beam induced current;
- dislocation;
13.Control of orientation from random to (220) or (400) in polycrystalline silicon films

机译：控制从多晶硅膜中随机到（220）或（400）的取向
- 作者：T. Kamiya;K. Nakahata;A. Miida;C. M. Fortmann;I. Shimizu
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
14.Properties of polycrystalline silicon films prepared from fluorinated precursors

机译：由氟化前体制备的多晶硅膜的性质
- 作者：Swati Ray;Sumita Mukhopadhyay;S. C. Saha;Sukti Hazra
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polycrystalline silicon;
- thin film;
- PECVD;
- characterization;
15.Role of the resistive layer on the performances of 2D a-Si:H thin film position sensitive detectors

机译：电阻层对2D A-Si：H薄膜位置敏感探测器性能的作用
- 作者：R. Martins;E. Fortunato
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- position sensors;
- devices;
- amorphous silicon;
- thin films;
16.Performances exhibited by large area ITO layers produced by r.f. magnetron sputtering

机译：由R.F产生的大面积ITO层表现出的性能。磁控溅射
- 作者：I. Baia;M. Quintela;L. Mendes;P. Nunes;R. Martins
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- indium tin oxide;
- r.f. magnetron sputtering;
- annealing;
- reannealing;
17.Ion implantation of microcrystalline silicon for low process temperature top gate thin film transistors

机译：低工艺温度顶栅薄膜晶体管微晶硅的离子植入
- 作者：V. Chu;H. Silva;L. M. Redondo;C. Jesus;M. F. Silva;J. C. Soares;J. P. Conde
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- microcrystalline silicon;
- ion implantation;
- thin film transistors;
18.Al-based sputter-deposited films for large liquid-crystal-display

机译：用于大型液晶显示器的基于Al的溅射沉积薄膜
- 作者：Hiroshi Takatsuji;Toshiaki Arai;Satoshi Tsuji;K. Kuroda;H. Saka
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- taguchi methods;
- large glass substrate;
- aluminum thin film;
- thin-film-transistor liquid-crystal displays;
- sputtering;
19.Deposition, defect and weak bond formation processes in a-Si:H

机译：A-Si的沉积，缺陷和弱键形成过程：H
- 作者：J. Robertson;M. J. Powell
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Deposition;
- weak bond formation;
- hydrogenated amorphous silicon;
20.Al-based aputter-deposited films for large liquid-crystal-display

机译：用于大型液晶显示器的基于Al的Apoutt沉积薄膜
- 作者：Hiroshi Takatsuji;Toshiaki Arai;Satoshi Tsuji;K.Kuroda;H.Saka;European Materials Research Society
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Taguchi methods;
- Large glass substrate;
- Aluminum thin film;
- Thin-film;
- Thin-film-transistor liquid-crystal displays;
- Sputtering;
21.Device-quality polycrystalline silicon films deposited at low process temperatures by hot-wire chemical vapor deposition

机译：通过热线化学气相沉积在低处理温度下沉积的装置质量多晶硅膜
- 作者：S. C. Saha;J. Guillet;B. Equer;J. E. Bouree
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polycrystalline silicon;
- thin films;
- hot-wire CVD;
- low-temperature deposition;
- UV-visible ellipsometry;
- dark conductivity;
22.Self-assembly of ultrathin composite TiO_2/polymer films

机译：超薄复合材料TiO_2 /聚合物薄膜的自组装
- 作者：N. Kovtyukhova;P. J. Ollivier;S. Chizhik;A. Dubravin;E. Buzaneva;A. Gorchinskiy;A. Marchenko;N. Smirnova
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- titanium oxide;
- polymer;
- wet layer-by-layer deposition;
- surface morphology;
- electrical properties;
23.Surface melt dynamics and super lateral growth regime in long pulse duration excimer laser crystallization of amorphous Si films

机译：无定形Si薄膜长脉冲持续时间准分子激光结晶的表面熔体动力学和超横向生长状态
- 作者：E. Fogarassy;S. de Unamuno;P. Legagneux;F. Plais;D. Pribat;B. Godard;M. Stehle
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- excimer laser;
- silicon crystallization;
- melting grains;
24.Surface passivation of silicon by rf magnetron-sputtered silicon nitride films

机译：通过RF磁控溅射氮化硅膜的硅表面钝化
- 作者：M. Vetter
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- silicon nitride;
- sputtering;
- passivation;
- solar cell;
- hetero junction;
- field-effect passivation;
25.Improved characterization of polycrystalline silicon film, by resonant Raman scattering

机译：通过谐振拉曼散射改善了多晶硅膜的表征
- 作者：V. Paillard;P. Puech;P. Temple-Boyer;B. Caussat;E. Scheid;J. P. Couderc;B. de Mauduit
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polycrystalline silicon;
- low pressure chemical vapor deposition;
- Raman scattering;
26.Laser crystallised poly-Si TFTs for AMLCDs

机译：激光结晶的Poly-Si TFT为AMLCDS
- 作者：S. D. Brotherton;J. R. Ayres;M. J. Edwards;C. A. Fisher;C. Glaister;J. P. Gowers;D. J. McCulloch;M. Trainor
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- poly-Si TFTs;
- AMLCDs;
27.Low temperature silicon deposition for large area sensors and solar cells

机译：大面积传感器和太阳能电池的低温硅沉积
- 作者：M. B. Schubert
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- thin film sensors;
- amorphous silicon;
- hot-wire deposition;
28.Large area X-ray detectors based on amorphous silicon technology

机译：基于非晶硅技术的大面积X射线探测器
- 作者：Jean-Pierre Moy
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- X-ray imaging;
- amorphous silicon;
- pixel;
- array;
- scintillator;
- photoconductor;
29.Temperature analysis of polysilicon thin-film transistors made by excimer laser crystallization

机译：通过准分子激光结晶制造多晶硅薄膜晶体管的温度分析
- 作者：V. Foglietti;L. Mariucci;G. Fortunato
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- excimer laser crystallization;
- density of states (DOS) model;
- kink effect;
30.Deposition of nanocrystalline silicon mediated by ultrathin aluminum underlayers by PCVD and sputter-deposition at 500 K

机译：通过PCVD和溅射沉积在500 k下沉积由超薄铝底层介导的纳米晶硅沉积
- 作者：Tilo P. Drusedau;Anette Diez;Jurgen Blasing
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- nanocrystallites;
- metal-induced crystallization;
- PCVD;
- magnetron-sputtering;
31.XPS characterization of tungsten-based contact layers on 4H-SiC

机译：4H-SIC基于钨的接触层的XPS表征
- 作者：A. Kakanakova-Georgieva;Ts. Marinova;O. Noblanc;C. Arnodo;S. Cassette;C. Brylinski
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- X-ray photoelectron spectroscopy;
- interface reaction;
- WN/SiC structure;
32.Performances presented by zinc oxide thin films deposited by spray pyrolysis

机译：由喷雾热解沉积的氧化锌薄膜所呈现的性能
- 作者：P. Nunes;B. Fernandes;E. Fortunato;P. Vilarinho;R. Martins
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- coatings;
- deposition process;
- zinc oxide;
- electrical properties;
- optical properties;
- X-ray diffraction;
33.Insulating layers of polycrystalline GaAsS compounds grown by reactive plasma sputtering

机译：通过反应等离子体溅射生长的多晶高钾化合物的绝缘层
- 作者：O. Pesty;P. Canet;F. Lalande;J. L. Seguin;H. Carchano
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polycrystalline GaAsS;
- reactive plasma sputtering;
34.Ge:Si:O evaporated alloys as a thermosensitive layer for large area bolometers

机译：GE：Si：o蒸发合金作为大面积钻头的热敏层
- 作者：E. Iborra;J. Sangrador;M. Clement;J. Perriere
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- silicon;
- germanium;
- amorphous;
- coevaporation;
- thermoresistor;
35.Single shot excimer laser crystallization and LPCVD silicon TFTs

机译：单次拍摄准分子激光结晶和LPCVD硅TFT
- 作者：Y. Helen;K. Mourgues;F. Raoult;T. Mohammed-Brahim;O. Bonnaud;R. Rogel;S. Prochasson;P. Boher;D. Zahorski
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Polysilicon films;
- thin film transistors;
- amorphous silicon;
- laser crystallization;
36.A new method for the determination of the channel length reduction in polysilicon thin film transistors (TFTs)

机译：一种确定多晶硅薄膜晶体管（TFT）中沟道长度减小的新方法
- 作者：Filippos V. Farmakis;Jean Brini;Georges Kamarinos;Nathalie Mathieu;Charalabos A. Dimitriadis
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polysilicon;
- thin film transistors;
- channel reduction;
37.Transport properties of μc-Si:H analyzed by means of numerical simulation

机译：通过数值模拟分析μC-Si：H的运输特性
- 作者：Alessandro Fantoni;Manuela Vieira;Rodrigo Martins
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- transport properties;
- μc-Si:H;
- numerical simulation;
38.Enhancing the field emission properties of amorphous carbon films by thermal annealing

机译：通过热退火增强非晶碳膜的场排放性能
- 作者：A. P. Burden;R. D. Forrest;S. R. P. Silva
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- amorphous hydrogenated carbon;
- amorphous semiconductor;
- plasma enhanced chemical vapour deposition;
- annealing;
- field emission;
- FED;
39.Solid-phase crystallization of amorphous SiGe films deposited by LPCVD on SiO_2 and glass

机译：LPCVD在SiO_2和玻璃上沉积的无定形SiGe膜的固相结晶
- 作者：J. Olivares;A. Rodriguez;J. Sangrador;T. Rodriguez;C. Ballesteros;A. Kling
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polycrystalline-SiGe;
- solid-phase crystallization;
- thin film transistor;
40.Microcrystalline silicon growth on a-Si:H: effects of hydrogen

机译：A-Si的微晶硅生长：H：H：氢气的影响
- 作者：P. Roca i Cabarrocas;S. Hamma
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- hydrogen;
- microcrystalline silicon;
- long range effects;
- ellipsometry;
- secondary ion mass spectrometry;
41.Plasma enhanced chemical vapor deposition of nanocrystalline silicon films from SiF_4-H_2-He at low temperature

机译：在低温下从SIF_4-H_2-HE的血浆增强纳米晶硅膜的化学气相沉积
- 作者：G. Cicala;P. Capezzuto;G. Bruno
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- nc-Si:H;
- SiF_4H_2-He plasma;
- optical emission spectroscopy;
42.From materials to products: a system perspective

机译：从材料到产品：系统视角
- 作者：Carlo Reita
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- large area electronics;
- products;
- displays;
43.Transport properties of #mu#c-Si:H analyzed by means of numerical simulation

机译：通过数值模拟分析＃Mu＃C-Si：H的运输属性
- 作者：Alessandro Fantoni;Manuela Vieira;Rodrigo Martins;European Materials Research Society
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Transport properties;
- #mu#c-Si:H;
- Numerica;
- simulation;
44.Crystallization control of the amorphous buffer layer in hydrogenated nanocrystalline silicon

机译：氢化纳米晶硅中无定形缓冲层的结晶控制
- 作者：F. Gourbilleau;A. Achiq;P. Viovenel;R. Rizk
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- hydrogenated nanocrystalline silicon;
- RF sputtering;
- amorphous buffer layer;
45.Stability of the dielectric properties of PECVD deposited carbon-doped SiOF films

机译：PECVD沉积碳掺杂SiOF膜的介电性质的稳定性
- 作者：Jorge Lubguban Jr;Atsusi Saitoh;Yoshihiro Kurata;Takao Inokuma;Seiichi Hasegawa
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- SiO_2:F:C;
- water resistivity;
- dielectric properties;
- vibrational properties;
46.Stability of low pressure chemical vapour deposition amorphous silicon

机译：低压化学气相沉积无定形硅的稳定性
- 作者：M. Kostana;J. Jang;S. M. Pietruszko
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- amorphous silicon;
- doping;
- hydrogenation;
- metastability;
- quenching;
47.Contactless electronic transport analysis of microcrystalline silicon

机译：非接触式硅的电子传输分析
- 作者：R. Brenot;R. Vanderhaghen;B. Drevillon;T. Mohammed-Brahim;P. Roca i Cabarrocas
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- transport;
- microcrystalline silicon;
48.Applicability of Raman scattering for the characterization of nanocrystalline silicon

机译：拉曼散射在纳米晶体硅谱表征的适用性
- 作者：Ch. Ossadnik;S. Veprek;I. Gregora
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Raman sattering;
- nanocrystalline silicon;
49.Characteristics of a linear array of a-Si:H thin film position sensitive detector

机译：A-Si：H薄膜位置敏感检测器线性阵列的特性
- 作者：E. Fortunato;F. Soares;P. Teodoro;N. Guimaraes;M. Mendes;H. Aguas;V. Silva;R. Martins
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- position sensors;
- devices;
- amorphous silicon;
- thin films;
50.Large-grained polycrystalline silicon on glass by copper vapor laser annealing

机译：通过铜蒸气激光退火玻璃上的大颗粒多晶硅硅
- 作者：J. R. Kohler;R. Dassow;R. B. Bergmann;J. Krinke;H. P. Strunk;J. H. Werner
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- large-grained polycrystalline silicon;
- copper vapor laser;
- crystallization;
51.Polycrystalline silicon film growth in a SiF_4/SiH_4/H_2 plasma

机译：SIF_4 / SIH_4 / H_2等离子体中的多晶硅膜生长
- 作者：B. Lee;L. J. Quinn;P. T. Baine;S. J. N. Mitchell;B. M. Armstrong;H. S. Gamble
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polysilicon;
- fluorine;
- thin film transistor;
52.Deposition of microcrystalline silicon in an integrated distributed electron cyclotron resonance PECVD reactor

机译：在集成的分布式电子回旋谐振粘合剂PECVD反应器中沉积微晶硅
- 作者：P. Bulkin;A. Hofrichter;R. Brenot;B. Drevillon
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
53.State creation induced by gate bias stress in unhydrogenated polysilicon TFTs

机译：栅极偏置应力在未氢化的多晶硅TFT中产生的状态创作
- 作者：B. Tala-Ighil;A. Rahal;K. Mourgues;A. Toutah;L. Pichon;T. Mohammed-Brahim;F. Raoult;O. Bonnaud
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polysilicon;
- TFT;
- reliability;
54.Lateral growth control in excimer laser crystallized polysilicon

机译：准分子激光结晶多晶硅中的侧向生长控制
- 作者：L. Mariucci;R. Carluccio;A. Pecora;V. Foglietti;G. Fortunato;P. Legagneux;D. Pribat;D. Della Sala;J. Stoemenos
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- lateral growth;
- crystallized polysilicon;
- super lateral growth;
55.Growth mechanism of microcrystalline silicon obtained from reactive plasmas

机译：从反应等离子体获得的微晶硅的生长机理
- 作者：Akihisa Matsuda
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- microcrystalline silicon;
- reactive plasmas;
56.Stability and transport properties of microcrystalline Si_(1-x)Ge_x films

机译：微晶Si_（1-x）Ge_x薄膜的稳定性和传输性能
- 作者：F. Edelman;T. Raz;Y. Komem;M. Stolzer;P. Werner;P. Zaumseil;H.-J. Osten;J. Griesche;M. Capitan
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- silicon-germanium films;
- X-ray diffraction;
- crystallization;
- hillocks;
- electron transport;
57.The control of the high-density microwave plasma for large-area electronics

机译：用于大面积电子产品的高密度微波等离子体的控制
- 作者：Hajime Shirai;Yoshikazu Sakuma;Hiroyuki Ueyama
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- large-area plasma;
- low-electron temperature;
- high-density plasma;
- microwave plasma;
- spokewise antenna;
- μc-Si:H;
- SiH_2Cl_2;
- high rate deposition;
58.Design issues of two-dimensional amorphous silicon position-sensitive detectors

机译：二维非晶硅位置敏感探测器的设计问题
- 作者：Jia-Yi Shung;Klaus Y.-J. Hsu;Yeu-Long Jiang;Cho-Jen Tsai
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- amorphous silicon;
- position-sensitive detector;
- spectral response;
- uniformity;
59.The control fo the high-density microwave plasma for large-area electronics

机译：用于大面积电子产品的高密度微波等离子体的控制
- 作者：Hajime Shirai;Yoshikazu Sakuma;Hiroyuki Ueyama;European Materials Research Society
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- Large-area plasma;
- Low-electron temperature;
- High-density plasma;
- Microwave plasma;
- Spokewise antenna;
- #mu#c-Si:H;
- SiH_2Cl_2;
60.Advanced excimer-laser annealing process for quasi single-crystal silicon thin-film devices

机译：准单晶硅薄膜器件的先进的准分子激光退火工艺
- 作者：Masakiyo Matsumura;Chang-Ho Oh
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- excimer-laser crystallization;
- thin-film devices;
- polycrystal silicon;
- grain;
- phase-shift;
- thin-film transistors;
- SOI;
- solar-cells;
- porous Si;
61.Carrier transport, structure and orientation in polycrystalline silicon on glass

机译：玻璃上多晶硅载流子运输，结构和方向
- 作者：K. Nakahata;A. Miida;T. Kamiya;C. M. Fortmann;I. Shimizu
- 会议名称：《Symposium E on thin film materials for large area electronics of the E-MRS 1998 spring conference》 | 1999年
- polycrystalline silicon on glass;
- X-ray diffraction;
- plasma enhanced chemical vapor deposition;