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Integrated optical device with at least one optical waveguide integrated on a semiconductor substrate

机译:具有集成在半导体衬底上的至少一个光波导的集成光学器件

摘要

1. Integrated optical device with at least one optical waveguide integrated on a semiconductor substrate. …??2.1. Low-loss passive and electrically controllable optical waveguides on a common semiconductor substrate, and their connection are to be capable of production as simply as possible. …??2.2. Use is made for this purpose of a ribbed waveguide defined by a rib (R1, R2) and a waveguiding layer (wS) of the substrate (S) and in whose region a pn or pin junction is provided in which the transition (Ü1, Ü2) from p-doped to n-doped or undoped material is arranged at a distance (D) from the waveguiding layer (wS), and the p-doped material is arranged on the side of said transition (Ü1, Ü2) averted from said layer (wS). …??2.3. Production of integrated optical switches, tunable integrated optical filters. …IMAGE…
机译:1.一种集成光学装置,其具有至少一个集成在半导体衬底上的光波导。 … 2.1。普通半导体衬底上的低损耗无源和电可控光波导及其连接应尽可能简单。 ……<2.2>。为此目的,使用由基板(S)的肋(R1,R2)和波导层(wS)定义的带肋波导,并在其区域内提供pn或pin结,其中的跃迁(Ü1,从p掺杂到n掺杂或未掺杂的材料的Ü2)距波导层(wS)的距离为(D),并且p掺杂的材料布置在与之相反的过渡层(Ü1,Ü2)的一侧表示层(ws)。 ……<2.3>。生产集成光开关,可调集成光滤波器。 …<图像>…

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