HYBRID MATERIAL FROM POLYCRYSTALLINE SILICON MATERIAL AND SILICON OR GERMANIUM COMPOUND AND PRODUCTION THEREOF

摘要

PURPOSE: To provide a novel material of amorphous silicon having excellent physical properties comparable with those of crystalline silicon. ;CONSTITUTION: The object material is a hybrid material which comprises an inorganic silicon material and a silicon or germanium compound where there exists at least one selected from silicon compounds formed from polysilane, germanium compounds formed from polygermane and silicon-germanium compounds formed from silane-germane copolymer in the grain boundaries of the inorganic silicon material formed from amorphous silicon.;COPYRIGHT: (C)1995,JPO