PURPOSE:To make it possible to attain evaluation of a proper reliability to various wirings by a method wherein a metal wiring reliability evaluation device is formed into a constitution, wherein the current value of electrifying a wiring, is changed according to a change in the resistance of the wiring. CONSTITUTION:A metal wiring reliability evaluation device is provided with a monitor means 2 for detecting the resistance of a wiring 1 and a control means (a controller) 3 for changing the current value of electrifying the wiring 1, according to a change in the resistance. Moreover, the device is provided with an thermostat 4, which keeps the wiring 1 to be evaluated (a sample) at a constant temperature, an application/measurement part 5, which applies a voltage and at the same time, conducts a measurement, and a power supply 6. In a measurement substrate of the part 5, the means 2 detects the resistance of the wiring 1 (Actually, the voltage is measured and is converted into the resistance). The means 3 is used as the controller which manages and controls from testing conditions to the measurement. Thereby, a proper evaluation can be realized even to wirings, which have not necessarily been made an evaluation of a proper reliability by a conventional technique.
展开▼
