ULTRAPRECISION GRINDING BY GAS CLUSTER ION BEAM

摘要

PURPOSE: To execute extremely high ultraprecision grinding by irradiating the surface of several kinds of solid with a gas cluster ion beam. ;CONSTITUTION: Gaseous CO₂ fed from a gas cylinder 3 is jetted from a nozzle 4 in a source chamber 1 at a supersonic speed and is adiabatically expanded to form gas clusters. The gaseous CO₂ clusters passthrough a skimmer 5, are fed to an ionized part 7 with the beam shape regulated and are ionized by the collision of electrons by filaments 6. After the clusters are accelerated by electrical fields in accelerating parts 8, the dimension of the clusters is sorted in a decelerated electrical field 9, furthermore, they are accelerated in accelerating parts 13 and are applied to the surface of the material 10 to be worked impressed with high voltage, thus ultraprecision grinding is executed to the smooth surface having extremely small surface roughness. In this case, the ultraprecision grinding can be executed, e.g. to the surface with a spherical or aspherical shape of dies for spectacle lens made of plastics or glass as the product 10 to be worked.;COPYRIGHT: (C)1996,JPO