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Modular semiconductor wafer transport and processing equipment
Modular semiconductor wafer transport and processing equipment
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机译:模块化半导体晶圆运输和加工设备
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摘要
A modular wafer processing machine (1, 2) which is based on interconnected handling units (400, 40a, 40b) having wafer handling arms (252, 256). Each unit can pass a wafer to another unit in the same vacuum environment to a processing module (30f, 30g, 300a-e).
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