Perfluoroelastomers (e.g. those used to make Kalrez? perfluoroelastomer parts) are widely used as. seals on semiconductor wafer processing equipment. They have extraordinary resistance to harsh chemicals and heat, enabling them to withstand virtually any process media, including reactive plasmas, at temperatures as high as 327°C.This paper is a review of perfluoroelastomers used as seals in semiconductor wafer processing. These seals offer cleanliness and lack of contamination while maintaining sealing functionality in aggressive "wet", "dry" and "thermal" processes. Applications include etching, ashing, stripping, cleaning, PECVD, HDPCVD, LPCVD, diffusion furnace and rapid thermal processing, etc. The ability of perfluoroelastomers to resist aggressive chemicals, plasmas as well as high temperatures will be discussed. A relative comparison of the various types of perfluoroelastomers used as well as a comparison to other elastomeric materials will also be presented.
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