Wafer - transport device, process chamber or containing these, semiconductors - wafer - they ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate control system and method for processing - of a semiconductor wafer

摘要

Wafer - transport device for use in a semiconductor - wafer - they ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate guidance system, in which the wafer - transport device comprises:an axis of rotation;a first wall, which extends from the axis of rotation;a second wall, which extends from the axis of rotation, wherein the second wall perpendicular to the first wall is;a wafer - holder, the at least to the first wall is coupled to and extends parallel to the second wall, wherein the wafer - transport device can be rotated by 90°, in order to the wafer from a first location in a process chamber to a second location to move in the process chamber, wherein the second place only in one direction is offset from said first location.