Platinum silicide Schottky diodes in a titanium-silicided CMOS- based high performance BICMOS process

摘要

A method for constructing a Schottky diode in an integrated circuit on a semiconductor substrate (18) includes forming a mask layer (22) over a region (12) of the semiconductor substrate at which the Schottky diode is to be formed. First portions of said mask layer (22) are removed to expose first regions (11) of said substrate (18). At least one semiconductor processing step is performed prior to the formation of the Schottky diode, which has processing temperature above about 450° C. in said first regions (11) of said substrate (18), such as forming TiSi.sub.2 (33-35) in portions of an FET device in the integrated circuit. A second portion of said mask layer (22) is removed to expose a second region (12) of said semiconductor substrate (18) at which said Schottky diode is to be formed, and a region (48) is formed in said semiconductor substrate (18) comprising a metal and a material of said semiconductor substrate (18) in said second region (12), such as platinum silicide. Additionally disclosed are techniques for forming contacts (139) to the Schottky diode (115) and other integrated circuit structures (107,108) at temperatures below those that would damage the Schottky diode (115).