Velocity-matched traveling-wave electro-optical modulator using a benzocyclobutene buffer layer

摘要

A method for use in fabricating an electro-optic structure on a substrate (68) having an optical waveguide (108) formed in an upper surface thereof, comprises the steps of forming a layer of organic dielectric material (110), such as a benzocyclobutene (BCB) resin, on the substrate upper surface, forming an interface layer (76) on an upper surface of the organic dielectric layer, and forming an electrically isolated electrode (54, 56) on an upper surface of the interface layer such that an electrical field can be induced in the optical waveguide.