capacitance absolute pressure sensor and method for (CAPACITIVE ABSOLUTE PRESSURE SENSOR and METHOD)

摘要

capacitance absolute pressure sensor (10) of the electrode (24) in the coating on the base plate (14) and the board (14) on the assigned graphics ram assembly (12) including. with the increase of the pressure of a painful memory (16), a bias electrode (24) and a contact (contact mode), the sensor (10) of the electrostatic capacity change. along with the change of electrostatic capacity detection, to detect the pressure change. the theory of the seed through the use of the graphics memory (16) in the chamber (34) and the electrostatic capacity of the change detection, the sense of pressure measurement. a vacuum chamber (34) to the sensing electrode and the insulating layer (32) and a thickness of the heat cycle, their exposure and the pain of the assembly (12) of the board (14), with the aircraft's maintenance.