A new touch mode capacitive pressure sensor with two deformable diaphragms

摘要

To achieve the characteristics of better linearity, a new type of touch mode capacitive pressure sensor named as DDTMCPS is devised, which has a pair of deformable sensing diaphragms. Compared to present touch mode capacitive pressure sensors, the new sensor is characterized by better linearity, and large linear operation range. Such a device also has high sensitivity, and other advantages of normal touch mode capacitive pressure sensor. In the case of such a novel sensor, the second diaphragm served as bottom electrode plays great roles in modifying the deflection of the first diaphragm served as top electrode, furthermore optimizing the performance of touch mode sensors. Silicon fusion bonding technology is advised to fabricate the novel device.