Simultaneous measurement modulo null of composition density of the thin film sample due to

摘要

PURPOSE:To easily measure the element concentration and density of a sample even when both are unknown by finding respective element concentration values and density values with which an intensity ratio by the measurement of elements becomes equal to a calculated intensity ratio. CONSTITUTION:The respective component element concentration values and density values of a thin film of the sample are assumed from the X-ray intensity ratio of characteristic X rays radiated from the thin film of the sample excited with an electron beam accelerated with a proper acceleration voltage or a single body standard sample of component elements. Then computer simulation based upon the assumed thin film component element density values is carried out to calculate the X-ray intensity ratio and the concentration values and density values which are so assumed to equal the X-ray intensity ratio obtained by the measurement are corrected. The corrected values are used to repeat the same calculation and then the thin film and density can be determined in the manner of successive approximation. Consequently, even when the respective element concentration values and density values are both unknown, a qualitative analysis using X rays is taken to enable the measurement.