机译:MW-ECR等离子体增强磁控共溅射制备SiC基薄膜的连续成分扩散研究
Key Laboratory of Materials Modification by Laser Ion and Electron Beams Ministry of Education School of Physics Dalian University of Technology Dalian 116024 People's Republic of China;
School of Chemical Engineering Dalian University of Technology Dalian 116024 People's Republic of China;