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Light trigger type semiconductor device

机译:光触发型半导体器件

摘要

An object of the present invention is to enhance the transmission efficiency of light signals. An output end of a light guide (10) is coupled to a light receiving portion (1a) of a semiconductor substrate (1) with an optical coupling agent (20). Reflection preventing films of silicon dioxide are formed on both the output end and the input end of the light guide (10). Similar reflection preventing films are formed on both surfaces of a light introducing window (42) provided at the input end of the light guide (10), too. The light introducing window (42) is provided to maintain the inside of the device airtight while enabling passage of light signals. Since the reflection preventing films are formed, the transmission efficiency of light signals is high, so that the sensitivity of the device increases.
机译:本发明的目的是提高光信号的传输效率。光导(10)的输出端通过光耦合剂(20)耦合到半导体衬底(1)的光接收部分(1a)。二氧化硅的防反射膜形成在光导(10)的输出端和输入端上。在设置于导光体(10)的输入端的导光窗(42)的两面也形成有同样的防反射膜。设置光导入窗(42)以在使光信号通过的同时保持装置内部的气密。由于形成了防反射膜,因此光信号的传输效率高,因此装置的灵敏度提高。

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