LOW TEMPERATURE FORMATION OF PIEZOELECTRIC/ ELECTROSTRICTIVE FILM TYPE ELEMENT UTILIZING ELECTROPHORESIS DEPOSITION METHOD AND PIEZOELECTRIC/ ELECTROSTRICTIVE FILM TYPE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive film type element into which particles are extremely densely packed by the low-temperature treatment alone.;SOLUTION: This method comprises a stage of preparing a dispersion mixture containing. ceramic constituting raw materials, a stage of preparing a liquid mixture by adding citric acid to this dispersion mixture of ceramic constituting components, a stage of obtaining superfine ceramic oxide powder which having a particle size of 1 m and having a uniform grain size distribution by non-explosive oxidation-reduction combustion reaction by executing a heat treatment at 100 to 500C, a stage of preparing a ceramic sol solution dissolved with the ceramic constituting components which are the same or analogous components as the components of the superfine ceramic oxide powder, a stage of mixing and dispersing the dispersion of the superfine ceramic oxide powder and the ceramic sol solution, a stage of forming the piezoelectric/electrostrictive film type element by immersing a substrate into a dispersion mixture composed of the superfine ceramic oxide powder and the ceramic sol solution and executing deposition by an electrophoresis method and a stage of subjecting the piezoelectric/electrostrictive film type element to a heat treatment at 100 to 600C.;COPYRIGHT: (C)2000,JPO