METHOD FOR MANUFACTURING PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE DEVICE IN LOW TEMPERATURE USING ELECTROPHORETIC DEPOSITION AND PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE DEVICE MANUFACTURED THEREFROM

摘要

PURPOSE: A method for manufacturing a piezoelectric/electrostrictive film type device is to decrease the energy required in electrophoretic deposition processes and to form a piezoelectric/electrostrictive film type device having a dense stacking grain structure with only low temperature treatment. CONSTITUTION: A method for manufacturing a piezoelectric/electrostrictive film type device in low temperature using electrophoretic deposition comprises the steps of: preparing a solution or dispersion mixture including a ceramic composition material by dissolving or dispersing the ceramic composition material in solvent or dispersion medium; obtaining mixing solution by adding citric acid to the dispersion mixture; obtaining ultra-fine ceramic oxide powder by heating the mixture solution in 100 to 500C so as to react nonexplosive oxidation-reduction combustion reaction, the powder having uniform grain size below 1 micrometer; producing dispersion solution by dispersing the ultra-fine ceramic oxidation powder in organic dispersion medium; producing ceramic sol-solution by dissolving the ultra-fine ceramic oxide powder and the like ceramic composition material in the base of water or organic solvent; electrophoretic depositing a substrate immersed into dispersing solution produced by mixing the ultra-fine ceramic oxidation powder with the ceramic sol-solution, to form piezoelectric/electrostrictive film type device; and heating the device in range of 100 to 600C.