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Contact Forming Method of Semiconductor Device

机译:半导体器件的触点形成方法

摘要

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a contact in a semiconductor device. In particular, a hemispherical polysilicon grain (hemispherical poly) is formed on a contact portion in order to improve a phenomenon that the contact resistance of the contact plug and the active region increases as the area of the contact portion decreases. The present invention relates to a method of reducing contact resistance of a semiconductor device which reduces contact resistance by forming -Si grains. The present invention provides a method of forming an interlayer dielectric layer on a semiconductor substrate on which an active region is formed, forming a contact hole for exposing an active region by removing a predetermined portion of the interlayer dielectric layer, and forming a surface on an exposed surface of the active region. Forming the nonuniform first conductive layer, forming a second conductive layer covering the surface of the first conductive layer so as to fill the contact holes, and patterning the second conductive layer.
机译:用于在半导体器件中形成接触的方法技术领域本发明涉及一种用于在半导体器件中形成接触的方法。特别地,半球形多晶硅晶粒(半球形多晶硅)形成在接触部分上,以改善随着接触部分的面积减小接触插头和有源区域的接触电阻增加的现象。本发明涉及一种降低半导体器件的接触电阻的方法,该方法通过形成-Si晶粒来降低接触电阻。本发明提供了一种方法,该方法在其上形成有有源区的半导体衬底上形成层间电介质层,通过去除层间电介质层的预定部分而形成用于暴露有源区的接触孔,并在表面上形成表面。有源区的暴露表面。形成不均匀的第一导电层,形成覆盖第一导电层的表面以填充接触孔的第二导电层,并图案化第二导电层。

著录项

  • 公开/公告号KR19990084555A

    专利类型

  • 公开/公告日1999-12-06

    原文格式PDF

  • 申请/专利权人 김영환;

    申请/专利号KR19980016414

  • 发明设计人 이창재;이성수;

    申请日1998-05-08

  • 分类号H01L21/28;

  • 国家 KR

  • 入库时间 2022-08-22 01:46:34

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