ANHYDROUS MONONUCLEAR TRIS(BETA-DIKETONATE) BISMUTH COMPOSITIONS FOR DEPOSITION OF BISMUTH-CONTAINING FILMS, AND METHOD OF MAKING THE SAME

摘要

Anhydrous mononuclear tris( beta -diketonato)bismuth complexes, useful as precursors for chemical vapor deposition of bismuth, for producing Bi-containing films of significantly improved stoichiometry, morphology and functional character, as compared to films obtained from dinuclear tris( beta -diketonato)bismuth complexes of the prior art.