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Semiconductor wafer processing apparatus comprising a wafer presence detector and method
Semiconductor wafer processing apparatus comprising a wafer presence detector and method
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机译:包括晶片存在检测器的半导体晶片处理设备和方法
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摘要
An apparatus for processing semiconductor wafers includes at least one wafer processing chamber, a wafer transfer module positioned adjacent the processing chamber, and a wafer cooling chamber having a window and a wafer support therein and being adjacent the wafer transfer module for receiving and cooling wafers downstream from the processing chamber. The apparatus also includes an optical sensor positioned adjacent the cooling chamber window and directed toward the wafer support for sensing wafer status. The sensor generates a signal responsive to sensed wafer status, and operation is interrupted if the wafer is missing or broken.
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