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Semiconductor wafer processing apparatus comprising a wafer presence detector and method

机译:包括晶片存在检测器的半导体晶片处理设备和方法

摘要

An apparatus for processing semiconductor wafers includes at least one wafer processing chamber, a wafer transfer module positioned adjacent the processing chamber, and a wafer cooling chamber having a window and a wafer support therein and being adjacent the wafer transfer module for receiving and cooling wafers downstream from the processing chamber. The apparatus also includes an optical sensor positioned adjacent the cooling chamber window and directed toward the wafer support for sensing wafer status. The sensor generates a signal responsive to sensed wafer status, and operation is interrupted if the wafer is missing or broken.
机译:一种用于处理半导体晶片的设备,包括:至少一个晶片处理室;位于处理室附近的晶片传送模块;以及晶片冷却室,该晶片冷却室中具有窗口和晶片支撑件,并且邻近晶片传送模块,用于在下游接收和冷却晶片从处理室。该设备还包括光学传感器,该光学传感器定位在冷却室窗口附近并且指向晶片支撑件以用于感测晶片状态。传感器响应于感测到的晶圆状态生成信号,如果晶圆丢失或损坏,操作将中断。

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