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Optical Multichannel Analyzer Spectroscopic Ellipsometry

机译:光学多通道分析仪光谱椭圆仪

摘要

The present invention not only greatly improves the convenience and precision of real-time experiments by automating the thin film growth process in real time and at high speed using an optical multichannel analyzer (OMA) with many pixels. The present invention relates to a high-speed spectroscopic ellipsometer which can change the incident angle of light incident on a sample and enables real-time measurement of the thin film growth process at a desired incident angle. Rotating optical bench 20 is installed on one side and the fixed optical bench 30 is installed on the other side frame 40; The discharge lamp 21 to which the power supply device 25 is connected, the rotating polarizer 22 and the first aperture 23 in which the first optical encoder is installed is installed at one side, and the fixing part and the fine rotation adjusting part are provided at one side. The rotary optical bench 20 having 24; A fixing optical bench 30 having a light receiving unit to which an electronic control unit is connected, an analyzer 31 and a second aperture 32 provided with a second optical encoder on one side thereof; And it is characterized in that consisting of the fixed shaft 10, the sample mounting table 50 is installed on the top.
机译:通过使用具有许多像素的光学多通道分析仪(OMA)实时,高速地自动化薄膜生长过程,本发明不仅大大提高了实时实验的便利性和准确性。高速椭圆偏振光谱仪技术领域本发明涉及一种高速椭圆偏振光谱仪,该椭圆偏振光谱仪可以改变入射到样品上的光的入射角,并且能够以期望的入射角实时测量薄膜生长过程。旋转光学平台20安装在一侧,固定光学平台30安装在另一侧架40上;与电源装置25连接的放电灯21,旋转偏光板22和安装有第一光学编码器的第一光圈23安装在一侧,固定部和微调部设置在一边。旋转光具座20具有24;固定光学平台30,具有与电子控制单元连接的光接收单元,分析器31和在其一侧上设置有第二光学编码器的第二光圈32;并且,其特征在于,由固定轴10构成的试样载置台50被安装在上方。

著录项

  • 公开/公告号KR200221715Y1

    专利类型

  • 公开/公告日2001-04-16

    原文格式PDF

  • 申请/专利权人 학교법인대우학원;

    申请/专利号KR19990005223U

  • 发明设计人 김상열;

    申请日1999-03-31

  • 分类号G01J3/28;

  • 国家 KR

  • 入库时间 2022-08-22 01:11:38

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