The subject innovation is an optical multichannel analyzer (OMA, Optical Multichannel Analyzer) an By automated to allow for real-time and high-speed spectroscopic measurement of a thin film growth process, not only can significantly improve the convenience and accuracy of real time experiments with having a number of pixels, it is possible to change the incident angle of light incident to a sample related to a desired angle of incidence is high-speed spectroscopic ellipsometer, real-time measurement of a thin film growth process in, and the fixed shaft 10, review articles in the central portion with respect to the fixed shaft (10) is on one side for rotating the optical bench 20 is installed a frame 40, which is an optical bench 30 for fixing to the other installation; Power supply 25 is connected to the discharge lamp 21, and the first optical encoder is a rotary polarizer 22 and the first diaphragm (23) laid at one side, and on one side of the government and control fine rotation section ( 24) the rotating optical bench 20 is provided with a; Light-receiving unit is an electronic control unit connected to the optical bench (30) for fixing the second optical encoder that the analyzer 31 and the second aperture 32 is provided on the installation side; And it characterized in that formed in the fixed shaft 10, which is a sample mounting table 50 is installed at the top.
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