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Multi-layer arc source ion plating equipment

机译:多层弧源离子镀设备

摘要

The present invention is a device for forming a coating film on a metal plate, and the substrate is mounted on the rotating jig of the rotating disc so that the substrate can be tunneled in and out, thereby making the coating surface constant when forming the coating film, and locking the rotating jig of the rotating plate. It is possible to easily mount a large quantity by using a jaw to be attached, as well as to a multi-layer arc source ion plating apparatus for forming a large amount of coating film at the same time.
机译:本发明是一种用于在金属板上形成涂膜的装置,并且将基板安装在旋转盘的旋转夹具上,使得基板能够穿入和穿出,从而在形成涂层时使涂膜表面恒定。膜,并锁定旋转板的旋转夹具。通过使用要安装的钳口,可以容易地大量安装,以及可以同时形成大量涂膜的多层电弧源离子电镀设备。

著录项

  • 公开/公告号KR200232050Y1

    专利类型

  • 公开/公告日2001-10-25

    原文格式PDF

  • 申请/专利权人 한산고진공산업 주식회사;

    申请/专利号KR19970006839U

  • 发明设计人 이태순;

    申请日1997-04-03

  • 分类号C23C14/34;

  • 国家 KR

  • 入库时间 2022-08-22 01:11:29

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