Composition Control of Alloy Coatings and Composition Design of Cathode Targets in Multi-Arc Ion Plating

摘要

The composition from alloy cathode target to alloy coating generally changes to some extent in multi-arc ion plating. This demixing effect leads to the difficulties in the control of alloy composition of coating and in the design of composition of alloy cathode target. A new simple formula, a_n = [(a_n^0?f_n)/Σ_i (a_i^0· f_i)]·100%, is proposed in present work to deal with the problem. According to this formula, the composition of alloy coating can be calculated by means of the degrees of ionization of alloy elements. The results of calculation agree with the experimental ones within very limited error range. Modifying the formula into another form, a_n^0= [(a_n/f_n)/Σ_i(a_i/f_i)]·100%, the design for alloy composition of cathode target can be conveniently carried out, and the ideal composition of alloy coating can be obtained.