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Lithographic mask design and synthesis of diverse probes on a substrate
Lithographic mask design and synthesis of diverse probes on a substrate
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机译:平版印刷掩模设计和衬底上多种探针的合成
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摘要
Systems and methods of synthesizing probes on a substrate are provided. One or more shift reticles are utilized to uniformly add monomers to the substrate at specified locations. The shift reticles are shifted relative to the substrate between monomer addition steps. Additionally, characteristics of the desired probes may be specified at synthesis time.
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