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Method of testing the gate oxide in integrated DMOS power transistors and integrated device comprising a DMOS power transistor
Method of testing the gate oxide in integrated DMOS power transistors and integrated device comprising a DMOS power transistor
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机译:测试集成DMOS功率晶体管中的栅极氧化物的方法以及包括DMOS功率晶体管的集成器件
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摘要
A method of testing a DMOS power transistor that includes arranging a switch between low-voltage circuitry and the gate terminal of the DMOS power transistor, maintaining the switch in an open condition, applying a stress voltage to the gate terminal, testing the functionality of the DMOS power transistor, and, if the test has a positive outcome, short-circuiting the switch through zapping by fusing a normally-open fusible link. An integrated circuit device with DMOS transistor is provided that includes a gate terminal of the DMOS transistor coupled to a control element, a normally-open switch element coupled in series between the gate terminal and the control element and including two metallic regions with an insulating between them connected in parallel with the switch element and in series between the gate terminal and the control element.
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