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Highly resistive recrystallized silicon carbide, an anti-corrosive member, a method for producing the highly resistive recrystallized silicon carbide, and a method for producing the anti-corrosive member
Highly resistive recrystallized silicon carbide, an anti-corrosive member, a method for producing the highly resistive recrystallized silicon carbide, and a method for producing the anti-corrosive member
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机译:高电阻的重结晶碳化硅,防腐蚀构件,高电阻的重结晶碳化硅的制造方法以及防腐蚀构件的制造方法
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摘要
A highly resistive recrystallized silicon carbide having open pores, wherein layered carbons on the inner wall surfaces of said open pores are removed and a resistivity at room temperature of said recrystallized silicon carbide is not less than 10000 &OHgr;·cm.
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