DEVICE FOR RECOVERING ELEMENT IN COMPOUND SEMICONDUCTOR, METHOD FOR RECOVERING ELEMENT, METHOD FOR DECOMPOSING AND REFINING ELEMENT, DEVICE AND METHOD FOR ETCHING COMPOUND SEMICONDUCTOR, AND METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To recover elements with high purity in a compound semiconductor substrate without exposing a film formed on the compound semiconductor substrate to an etchant. SOLUTION: While an atmosphere surrounding a compound semiconductor substrate is substituted by an inert atmosphere, the compound semiconductor substrate is hearted so as to be thermally decomposed into solid state power elements and liquid state elements. The solid state powder elements are collected, and then, the liquid state elements are collected.