Dicing saw having an annularly supported dicing blade

摘要

An improved dicing wheel configuration is described herein. In one embodiment, the dicing wheel comprises: a hub, a blade, and an annular support. The hub is mounted on a shaft, and it clasps the blade. The annular support is compressed against the blade by the hub, and it has an outer diameter intermediate the outer diameters of the hub and the blade. A second annular support may also be compressed against the blade on the opposite side from the first annular support, and the annular support(s) may be separable from or bonded to the blade. The improved configuration preferably provides sufficient clearance for the hub to pass over solder bumps, stacked dies, or other protrusions on the wafer. The invention further contemplates methods for forming and using such a dicing wheel, as well as chips cut using such a dicing wheel.