首页>
外国专利>
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber
展开▼
机译:沟槽和防溅板,用于在从单个晶圆清洗室转移晶圆时保护晶圆
展开▼
页面导航
摘要
著录项
相似文献
摘要
A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.
展开▼