Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber and positioning such a wafer in this single wafer chamber

摘要

An apparatus that includes a rotatable single wafer holding bracket with one or more wafer supports disposed on the single wafer holding bracket, wherein the one or more wafer supports position a center of a wafer to be off-center from an axis of rotation of the single wafer holding bracket.